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Keynote Talk

Peter Thiesen

Park Systems GmbH, Germany

Deeper insights into graphene and 2D-Materials by Imaging spectroscopic Ellipsometry (ISE)

 

Imaging Spectroscopic Ellipsometers (ISE) combine the benefits of ellipsometry and optical microscopy in a single device. The unification of the two technologies creates a unique metrology tool that redefines the limits of both ellipsometric measurements and polarization-contrast microscopy. The enhanced spatial resolution of imaging ellipsometers (about 1 µm) expands ellipsometry into new areas of microanalysis, microelectronics, and bio analytics. Imaging Ellipsometry is an all-optical, non-contact metrology technique that excels at the layer-thickness and material characterization of micro-structured thin-film samples and substrates.

 

In the field of 2D materials characterization, Imaging Spectroscopic Ellipsometry enable the determination of optical properties of micro crystals [1],[2],[3]. The data are required for a better understanding of 2D material based devices [4],[5].

 

From the macroscopic point of view, ellipsometric contrast micrographs or microscopic maps of Delta and Psi can be stitched and offer a fast, non-contact, wafer-scale, atomic layer resolved imaging of 2D materials [6] on a variety of substrates. Including maps recorded at different wavelengths, a specific search for microcrystals with a dedicated number of layers or a predefined thickness was reported. Recent studies also show the possibility of imaging buried layers [7].

 

References

 

  1. S. Funke et al., J. Phys.: Condens. Matter 28 (2016) 385301.
  2. G.A. Ermolaev et al., Nat Commun 12 (2021), 854.
  3. P. G. Zotev et al., Laser Photonics Rev. 17 (2023), 2200957
  4. S. R. Tamalampudi et al., npj 2D Materials and Applications 8 (2024) 46.
  5. Dushaq, G. et al., Light Sci Appl 13, (2024) 92.
  6. P. Braeuninger-Weimer et al., ACS Nano 12, (2018) 8555–8563.
  7. Irina Chircă et al., 2D Mater. 11 (2024) 045001

 

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