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Utilizing of high-throughput and high-resolution automated 3D-AFM for CD measurement and trench sidewall characterization

Dr. Nithi Atthi

Thai Microelectronics Center (TMEC) - National Electronics and Computer Technology Center (NECTEC), Thailand

Dr. Nithi Atthi received his bachelor’s degree in Materials Engineering and master’s degree in engineering management from Kasetsart University (KU) in 2004 and 2008. In 2013, he won the MEXT Monbukagakusho scholarship granted by the Japanese Government to pursue his graduate study at the Tokyo Institute of Technology and received his master’s degree and Ph.D. in Electronics and Applied Physics. He was awarded the Green Talent Fellow (Germany) in 2018, the 10th HOPE Meeting Fellow (Japan) in 2018, the Young Leaders of the 16th STS Forum (Japan) in 2019, and the Leaders in Innovation Fellowships (LIF), (UK) in 2022. He has authored and co-authored 45 technical journal publications, given a talk on his research at more than 122 academic conferences, and filed 27 domestic and international patents. In 2018, he was appointed as a Leader of the Surface and Microfluidic Device Innovation Research Team at the Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center (NECTEC), Thailand. In 2023, he becomes a Fab manager at TMEC. His research focuses on Si-based CMOS and MEMS process technology, advanced lithography, high-k/metal gate stacks for FinFETs, silicon photonic devices, microfluidic devices, and superamphiphobic and anti-fouling surfaces for various applications.

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